However, MEMS technology has altered or enhanced some of these techniques, as well as added new processes, in order to build mechanical devices such as microfluidic channels, gears, cantilevers, micro ...

There are MEMS temperature sensors, magnetic field sensors, radiation sensors, and more. There are microscopic motors that use electrostatic force instead of electromagnetic, micro gas valves ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized ... Our recent work has fabricated hemispherical ...

[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical Systems, which operate in a decidedly mechanical way. You can see the video, which has some gorgeous ...

The scale of these phenomena makes them clearly relevant to future micro- and nanoelectromechanical systems (MEMS/NEMS ... the wear rates of microfabricated motors made of silicon are quite ...