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ALN
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(PDF) Fabrication of FBAR (SMR) …
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Diagram of the AlN-based SMR. | Download Scient…
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(PDF) MICROMACHINED AlN BASED FBAR STRU…
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(a) Cross-section of a typical AlN-based SMR showing the Ir/AlN/Mo/Ni ...
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The resonance frequency figure of the AlN-based FBAR sensor after ...
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The resonance frequency figure of the AlN-based FBAR sensor before ...
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(a) Thermal resistance of the FBAR vs AlN thickness at a…
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The layout of the AlN FBAR test structure. | Download Scientific Dia…
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Magnitude of the measures S parameters of the AlN based FB…
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The performance parameters of FBAR/HBAR/SMR devices with ZnO thi…
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(a) Schematic of the TS mode FBAR with c-axis tilted AlN film with the ...
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Membrane structure FBAR fabricated with highly c-axis oriented AlN film ...
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The measurement result of an FBAR fabricated on our high-yield AlN MEMS ...
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The measurement result of an FBAR fabricated o…
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Simulated impedance curve of FBAR and SM…
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Resonant frequency of SMR filters with as-deposited and annealed Al…
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(a) Schematic cross-section …
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(a) Schematic cross-section of AlN-based F…
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Color online FBAR's configuration of S…
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(a) SEM image of the fabricated FBAR with sup…
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(a) SEM image of the fabricated FBAR with support columns. (b) S…
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Fig1. Schematic device structure …
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a An SEM image of the AlN nanowires with high densit…
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Identification of the SMR and AMR contributions to the l…
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